Product overview
Key Features
Lightning-Fast Cycle Times: Completes a full process (alignment and ID reading) of 25 wafers in approximately 35 seconds.
Dual Reading Capability: Supports both front-side and back-side code recognition without manual intervention.
Integrated Precision: Equipped with the industry-leading IOSS WID120 Wafer ID Reader for superior decoding accuracy.
Intelligent Mapping: Features a mapping sensor to detect wafer presence, cross-slots, or double-slots before processing.
Advanced Alignment: Provides automatic notch-alignment of all wafers inside the cassette for uniform positioning.
User-Friendly Interface: Operated via an intuitive 10.1" touchscreen with a SEMI standard Graphical User Interface (GUI).
Cleanroom Certified: Designed for high-purity environments, certified to ISO Class 3 (formerly FS209E Class 1).